摘要
材料的表面与基体内部在结构和性能上都会存在差异,这就要求对薄膜材料的制备及其表征方法有基本的了解.分析了薄膜材料的分类、常见制备方法及其原理,对材料表面的组分、结构、形貌等分析方法进行了归纳总结,并利用XRD,SEM,EDAX等进行逐项表征,获得了完整的材料表面信息,得出了薄膜材料的工艺制备,采用磁控溅射的方法较好.
There are differences between the surface and the matrix of materials in structures and proper- ties,which require good understanding of preparation and characterization methods of thin films. The classification and common preparation methods of thin film materials and the principles were analyzed, the composition, structure, morphology and other analysis methods of material surface were summarized. By using X-ray diffraction （XRD）, scanning electron microscope （SEM） and energy dispersive analysis system of X-ray （EDAX）,complete information of material surface was obtained. The result shows that industrial preparation of thin film by magnetron sputting is better.
出处
《上海工程技术大学学报》
CAS
2012年第2期125-128,132,共5页
Journal of Shanghai University of Engineering Science
基金
上海工程技术大学研究生科研创新资助项目(2011yjs15)
关键词
薄膜分类
制备
分析方法
薄膜分析技术应用
film classification
preparation
analysis method
application of thin film analysis technology
