摘要
为了满足微电子学以及仪器科学与技术等专业实践教学与人才培养的需要,以MEMS加速度开关为应用对象,开展MEMS加工技术综合性实验研究。根据MEMS加速度开关的结构特点,设计加工工艺流程;以MEMS工艺理论知识为基础,结合实践教学,开展湿法腐蚀、阳极键合、ICP刻蚀等关键加工工艺研究,完成MEMS加速度开关原理样品的研制。该实验从器件结构、加工工艺到测试分析,简单直观,有利于学生全面掌握MEMS加工工艺,培养学生的科研兴趣和实践能力。
In order to meet the needs of the practical teaching and personnel training in microelectronics,instrument science and technology,etc.,and by taking MEMS acceleration switch as the object of application,the comprehensive experimental study of MEMS machining technology is carried out.According to the structure characteristics of MEMS acceleration switch,the machining technological process is designed.Based on the knowledge of MEMS process theory and practical teaching,the key processing technology such as wet etching,anodic bonding,ICP etching,etc.,is studied,and the principle sample of MEMS acceleration switch is developed.This experiment is comprehensive,systematic,simple and intuitive from the aspects of the device structure and the processing technology to the test analysis,and it is beneficial for the students to master the MEMS processing technology comprehensively,and to cultivate their research interest and practical ability.
出处
《实验技术与管理》
CAS
北大核心
2017年第7期95-98,102,共5页
Experimental Technology and Management
基金
国家自然科学基金专项基金科学仪器基金项目(61327002)
重庆大学教改项目(2015Y19)
关键词
实践教学
综合实验
工艺流程
关键加工工艺
practical teaching
comprehensive experiment
technological process
key machining technology
