摘要
石墨加热器作为多晶硅铸锭工艺中的热源,它的尺寸和位置直接影响了多晶硅晶体生长过程中的温度分布和固液界面。通过对顶加热器、侧加热器以及顶-侧加热器三种不同的加热器的热场模拟研究,计算结果表明:目前采用的顶-侧加热器在多晶硅熔融和晶体生长过程中能够获得较好的效率和固液界面。
Graphite heater is the only heat source during the multi-crystalline silicon ingot casting process, And the temperature field of the solid-liquid interface is affected by the size and position of graphite heater. Three different graphite heaters were studied. The results show that the lateral and vertical heater produces the better shape of the solid-liquid phase boundary and the casting process has better efficiency.
出处
《电子工艺技术》
2012年第2期106-109,共4页
Electronics Process Technology
关键词
多晶硅锭
石墨加热器
定向凝固
数值模拟
Multi-crystalline silicon ingot
Graphite heater
Directional solidification
Numerical analysis
