摘要
对多晶硅锭生产过程中装料工艺和铸锭工艺进行研究,在不增加投入和不降低生产效率的基础上,通过对硅料配比和排布方式进行调整,实现877 mm×877 mm×420 mm坩埚中480 kg合格硅锭的生产,使装料量增加20 kg/锭;并通过对铸锭工艺关键点的有效控制,将硅锭有效利用率提高至70%,实现降低生产成本,提高设备产能的目的。
Achieved the production of 480 kg silicon-ingot in the pot 877 mm×877 mm×420 mm by adjusting the silicon material proportion and arrangement,based on the research of the loading process and casting process of polycrystalline silicon ingot production,without any increase in investment,and does not reduce the production efficiency.The weight of ingot increased by 20 kg,and the effective utilization rate reached to 70% by controlling the key point of casting process,reduced the production cost,increased the productivity.
出处
《电子工艺技术》
2013年第4期246-249,共4页
Electronics Process Technology
基金
国家863科研攻关项目(项目编号:2006AA05Z407)
关键词
大尺寸硅锭
定向凝固
装料工艺
铸锭工艺
Large size silicon ingot
Directional solidification
Loading process
Casting process
