摘要
本文给出了用硅平面工艺和微加工工艺制造的漂浮膜真空传感器。传感器的测量上 限为１０ ｋＰａ，分辨率为１０ｍＰａ。传感器的特性和物理模型推出的公式很一致，误差 为２％。
In 1985,the first integrated thermal vacuum sensors were developed with size 6×6 mm～2 in form of cantilever beam. They are very useful for pressure measurement down to 10 mPa. However, they decrease their sensitivity at high pressure (>10Pa). The new thermal sensors fabricated by silicon planar techology and the micromachining of silicon, called the floating membrane vacuum sensor, is presented. The upper pressure limit of the sensor is of the order of 10 kPa, and the resolution is found to be of the order of 10 mPa. The characteristics of the sensor is uniform with formula derived from model the physical model. Its error is 2%.
出处
《真空》
CAS
北大核心
1990年第3期31-34,共4页
Vacuum
