摘要
介绍了ＥＭ系列光刻机（俄产）的多发故障，如真空传感器及间隙设定单元故障及其维修方法。同时提出对设备的一些保养措施。
This paper describes the common mulfunction of EM serial
mask aligner made in Russia,such as basic principle and mulfunction of vacuum sensor and gap
setting mulfunction,as well as some approaches of repairing maintenance.
出处
《半导体情报》
1999年第3期50-52,55,共4页
Semiconductor Information
