摘要
介绍了声表面波气体传感器的检测原理。设计了传感器的驱动电路,把声表面波器件作为反馈回路中的一个感抗元件,使回路产生振荡,同时检测输出频率和幅度的变化,比以往单一检测频率的变化,提高了检测精度。采用基底为ST切石英延迟线型结构,镀上金属氧化物,测试了对二氧化氮的敏感特性。由于气体和氧化物的相互作用,输出频率和幅度均下降。当把测试箱打开放出气体,频率很快恢复到初始频率点,而幅度基本保持平稳。
The detecting principle of surface acoustic wave（SAW） gas sensor is presented in this paper.The driving circuit has been designed.SAW device was used as an inductance component in the feedback loop to generate the oscillation and the change of the output frequency and amplitude was detected simultaneously.Comparing with the former method of simply detecting the frequency,the detecting precision has been improved by using the method proposed in this paper.A delay line structure on the substrate of ST-quartz has been fabricated and the metal oxide has been coated on the structure.The sensitivity of the structure to the NO2 has been tested.Both the output frequency and amplitude have been decreased because of the interaction between the gas and the oxide.When the gas was let out,the frequency quickly returned to the initial value and the amplitude kept stable.
出处
《压电与声光》
CAS
CSCD
北大核心
2010年第6期912-914,952,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(60572018)
天津市科技发展计划科技攻关基金资助项目(05YFGPGX04900)
