摘要
理论上研究了声表面波气敏传感器敏感薄膜厚度对系统灵敏度的影响。分析了气体浓度、敏感薄膜厚度、敏感薄膜密度对系统灵敏度的共同影响。提出了最佳薄膜厚度的概念,并给出了相应的关系式。
Influence of sensitive layer of surface acoustic wave sensor on the sensitivity of system was researched theoretically. Total influence of gas concentration, thickness and density of sensitive layer to the sensitivity of system was also analyzed. Then the idea of optimization of the layer thickness was proposed and the corresponding formulas were presented.
出处
《压电与声光》
CAS
CSCD
北大核心
2009年第4期461-463,共3页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(60572018)
天津市科技发展计划科技攻关基金资助项目(05YFGPGX04900)
关键词
声表面波
敏感薄膜
最佳薄膜厚度
surface acoustic wave
sensitive layer
optimal layer thickness
