摘要
ＦＰ标准具和干涉仪利用多光束干涉的原理，产生极锐的干涉条纹并且谐振频率对ＦＰ腔长的变化非常敏感，根据这些特点，从利用ＦＰ干涉仪进行激光器的频率锁定、稳频，光学倍程精密定位和纳米测量三个角度综述了在长度测量领域ＦＰ干涉仪的发展情况；在分析主要存在的问题和解决方法的基础上，讨论了ＦＰ干涉仪的发展方向，并指出在纳米测量中ＦＰ干涉仪将起到越来越重要的作用。
Etalon or Fabry Perot interferometer (FPI) based on multi beam interference principle can generate very narrow fringe and is sensitive to cavity length change. In this paper, three kinds of applications in length measurement of Etalon and FPI are reviewed: frequency locking and stabilization of lasers, precision positioning using optical multiplier and applications in nanometrology. The obstacle and the solutions in using FPI are also presented and the trend of FPI is given next. At last the possibility and importance of FPI in nanometrology is specially emphasized.
出处
《激光技术》
CAS
CSCD
北大核心
1999年第3期134-137,共4页
Laser Technology
关键词
F-P干涉仪
光学倍程
纳米测量
激光器
Fabry Perot interferometry frequency stabilization optical multiplier nanometrology multi beam interference
