摘要
较详细介绍了０．８～１μｍ分步重复投影光刻机的主计算机实时控制系统接口设计，所有接口均采用隔离措施，各种类型接口都具有方便的再扩展功能，接口软件用ＢｏｒｌａｎｄＣ＋＋语言编写，可方便调配组合使用。
The interface design for master computer real time control system used in 0.8~1μm wafer stepper is introduced in detail in the paper.The isolation measures are adopted in all the interfaces and they have the function of re expansion.The interface software is programmed with Borland C++ language and it can be conveniently allocated and applied.
出处
《光电工程》
EI
CAS
CSCD
1998年第3期27-31,共5页
Opto-Electronic Engineering
基金
国家"八五"科技攻关项目
关键词
分步重复光刻机
接口
实时控制系统
光刻机
Step and repeat photoetching machines,Interface,Real time control systems.
