摘要
采用MeF3金相显微镜对CVD金刚石膜－硬质合金基体横截面的组织进行了观察，重点研究了甲烷浓度对CVD金刚石膜－基横截面各组织层次的影响。结果表明：硬质合金基体的表面组织发生了显著的变化，形成了不同的组织层次，在化学侵蚀脱钴和等离子体刻蚀脱碳预处理的基础上所沉积的金刚石膜－基横截面组织层次为：金刚石膜／薄的石墨或游离碳层／细小WC层／残留脱碳层（η相十W相）／残留疏松层／YG8基体，甲烷浓度对各层次的形成和厚度有显著的影响。
The cross-sectional morphologies of chemical vapor deposited diamond thin films synthesized onto the cobalt cemented tungsten carbide(YG8) substrate using various methane concentrations by D . C . plasma jet CVD method have been observed by means of MeF3 optical microscope with high resolution . The effect of methane concentration on the cross-sectional microstructure layers was mainly investigated . The results show that the surface microstructures of cemented carbide substrate aremodified significantly and there are various microstructure layers on the cross-section . Typical cross-sectional morphology of diamond film-cemented carbide substrate formed on the basis of pretreatment processes such as chemically cobalt-removed and plasma-etch decarbonizing treatments is as follows : diamond thin film , graphite or free carbon thin film , small WC grains layer , retained decarbonized layer (W and η phases ), residual porous layer , YG8 cemented carbide substrate. Methane concentration has aobvious influence on the formation and thickness of above-mentioned layers .
出处
《功能材料》
EI
CAS
CSCD
北大核心
1998年第6期655-658,共4页
Journal of Functional Materials
基金
广东省科委基金
广东省高教厅基金
关键词
CVD
金刚石膜
金相技术
硬质合金
横截面形貌
CVD diamond film, metallographic technique, cemented carbide, cross-sectional morphology
