摘要
采用SEM对金刚石薄膜涂层硬质合金刀具的金刚石薄膜表面、背面及金刚石薄膜剥落后的硬质合金刀片表面的典型形貌进行了观察，并采用TEM对金刚石薄膜／硬质合金刀片横截面的微观组织进行了研究，还采用FT—Raman光谱法对金刚石薄膜表面及金刚石薄膜剥落后的硬质合金刀片表面的微观结构进行了表征．结果表明：经适当的化学侵蚀脱钻和等离子体刻蚀脱碳预处理后，金刚石薄膜涂层硬质合金刀具的界面通常存在薄的（数十um）石墨碳层；局部区域见到金刚石粒子直接生长在WC颗粒上,金刚石膜／基横截面的典型组织层次为：金刚石薄膜／薄的石墨碳层／细小的WC层／残留的脱碳层（η相＋W相）／原始的硬质合金基体．
The surface and backside morpologies of diamond thin film as well as the surface morphologyof the cobalt cemented tungsten carbide (YG8) insert after deposited using D. C. plasma jetCVD method were observed by SEM. The cross- sectional morphology and microstructure ofa CVD diamond thin film grown onto the cemented carbide insert were studied by means ofTEM. Fourier transformated laser Raman spectrometry was also used to characterize the structurecompositions of the diamond thin film deposited and the cemented carbide insert surface afterdiamond thin film delaminated. The results show that there exists a thin layer of graphite carbon(tens of nanometers) at the interface of a diamond thin film coated cemented carbide insert. Ithas been seen, However, that diamond particles can be grown directly onto WC crystals at partialzones. Typical cross-sectional morphology of a diamond thin film coated cemented carbide insertformed on the basis of pertreatment processes such as chemically cobalt-removed and plasmaetchingdecarbonized treatments is as follows: diamond thin film, graphite carbon thin layer, small WCgrains layer, retained decarbonized layer (W and n phases), YGS cemented carbide substrate.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1998年第5期703-709,共7页
Journal of Inorganic Materials
基金
广东省科委基金!950263
广东省高教厅基金!960004
关键词
金刚石薄膜
硬质合金
界面
刀具
涂层
diamond thin film, cemented carbide, interface, cross-sectional morphology
