摘要
设计了过渡层和梯度膜结构,采用PVD磁控溅射工艺和PVD磁控溅射+PECVD(脉冲等离子增强化学气相沉积)复合工艺在高速工具钢W6Mo5Cr4V2表面制备不同的类金刚石(Diamond-like Carbon,DLC)膜:Ti过渡层+DLC膜以及CrN+CrNC+CrC+DLC(掺杂Cr)硬质膜。对这两种膜层的成分、结构、形貌和力学性能的对比分析发现,前者表面粗糙度小,但是后者的综合力学性能更好。
After the designing of transition layer structure and gradient coating stricture, the different DLC films on the surface of the high speed steel W6Mo5Cr4V2 samples were prepared, which are Ti （transition layers） -DLC films prepared by PVD magnetron sputtering method and CrN ＋ CrNC ＋ CrC （transition layers） ＋ DLC films （doped with Cr） prepared by PVD magnetron sputtering and pulse plasma enhance chemical vapor deposition method. Test and contrastive analysis for the two kinds of DLC films, including elements, structure, morphology and mechanical behaviors, showed that the Ti-DLC films exhibited more smoothy surface, but the CrN ＋ CrNC ＋ CrC ＋ DLC films （doped with Cr） by gradient coating was of better mechanics properties.
出处
《上海金属》
CAS
2009年第6期32-37,共6页
Shanghai Metals
关键词
类金刚石膜
磁控溅射
脉冲等离子增强化学气相沉积
高速工具钢
Diamond like Carbon Film, Magnetron Sputtering, Pulse Plasma Enhance Chemical Vapor Deposition, High Speed Steel
