摘要
本文介绍了由单片机组成的可控硅磁控溅射靶极电源自组织模糊控制系统，给出了主要硬件电路，对软件功能进行了说明，尤其对自组织模糊控制算法作了较为详细的论述。该系统动态特性良好，抗干扰能力强，有自组织、自学习和系统辩识的能力。
Abstract In this paper, there is an introduction of the self organizing fuzzy control system of the SCR magnetic sputter cathodic power source, which is designed on the basis of the single chip microcomputer. The main hardware circuit and the explanation of the software are provided, especially the detailed explanation of the algorithm of the self organizing fuzzy control. The control system, which is capable of self organization self study, and system identification, possesses strong anti interference and good dynamic characteristics.
出处
《真空》
CAS
北大核心
1998年第4期28-33,共6页
Vacuum
