摘要
传统的化学电镀技术在生产过程中会产生大量的三废污染,而绿色镀膜技术可以很好地解决该问题。磁控溅射镀膜是绿色镀膜技术中的重要环节。针对大型绿色真空镀膜设备,介绍了一种大功率绿色镀膜用磁控溅射电源的设计方法,描述了电源控制算法,通过部分电路图和波形图介绍了主电路设计、开关管的并联和高频整流滤波电路等几个问题;同时给出了设计高频变压器的过程和方法。该电源已用于实际生产中,且运行效率高,工作可靠。
Conventional chemical plating technology in the production process emits a large amount of waste pollution,but the green coating has a good solution of this problem.Magnetron sputtering technology of the green coating is very impor-tant for Large green vacuum coating equipment.This paper introduces a high-power switching power supply by some circuit diagrams and waveforms.It introduces a few questions such as the design of the main circuit,the parallel of the switches and the circuit of the high-frequency rectifier.At the same time,the paper introduces the process and methods of the design of specific high-frequency transformer.The power supply is used in actual production and has high efficient of operation and works reliably.
出处
《电力电子技术》
CSCD
北大核心
2010年第4期66-68,共3页
Power Electronics
基金
2007年度国家重点新产品计划立项项目(2007GRG10004)~~
关键词
磁控溅射电源
绿色镀膜
滑模控制
高频变压器
magnetron sputtering power
green coating
sliding mode control
high-frequency transformer
