摘要
可运动的微结构是MEMS器件的重要单元,其运动特性与器件的性能和可靠性是密切相关的.针对频闪成像技术获得的微结构运动图像序列,提出一种微结构旋转角度的快速测量方法.该方法利用运动微结构上普遍存在的释放工艺孔结构作为目标特征,对其中两个释放工艺孔的图像特征分别求取质心和两质心连线的斜率,最后比较运动图像序列中质心斜率的变化,得到各运动状态下的旋转角度.实验结果表明,该测量方法的运算时间小于0.5s,角度测量分辨率可达到0.01°.
Movable microstructures are the key components of MEMS devices, and their motion characteristics are corresponding to the performance and reliability of these devices. For the motion image sequence of microstruetures collected by stroboscopic imaging technology, this paper puts forward a fast measurement method for the rotation angle of microstructures. Since some releasing holes generally exist in the microstrueture, the method calculates the centroids of two releasing holes and the slope of the line between two centroids in every image. Thus, the rotation angle of the microstructure can be obtained by analyzing the slope variety of the line in the image sequence. The experimental result proves that the operation time of this method is less than 0. 5 s and the measurement resolution of the angle can achieve 0.01°.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2009年第4期328-332,共5页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(50505031)
国家高技术研究发展计划(863)项目(2006AA04Z327)
新世纪优秀人才支持计划资助
关键词
MEMS微结构
旋转角度
释放孔
质心
MEMS microstructure
rotation angle
releasing hole
centroid
