摘要
微结构是微器件或微系统的基本组成部分,对其运动特性的测试有助于对器件或系统的性能和稳定性进行评价.为此,针对频闪成像技术获得的微结构运动图像序列,对数字散斑相关技术应用于微结构平面运动特性测试的实现方法进行了探讨,采用梯度法实现全局刚性位移的精确测量,并作为牛顿迭代法的初值进行区域变形量的提取,具有较高的计算效率.SiCRF微谐振器平面运动特性测试实验表明,微结构平面刚性位移测量的分辨率和偏差分别能够达到1/100像素和1/20像素,区域变形信息提取的有效性也得到了初步验证.
Micro-structures are the basic units of micro-devices or micro-systems. Characterizing the motion of micro-structures is helpful for evaluating the performance and reliability of micro-devices. Aiming at the motion image sequence of micro-structures collected by stroboscopic imaging technology, this paper discussed the application of digital speckle correlation method for measuring the in-plane motion of micro-structures. The global rigid displacement was measured accurately by using the gradient method, meanwhile, as the initial values of Newton-Raphson iterative method for extracting the information of local deformation with the computing speed improved. The experiment on the in-plane motion of a SiC RF resonator indicates that the measurement resolution and deviation of in-plane rigid displacement can reach 1/100 pixel and 1/20 pixel, respectively, and the validity of extracting the information of local deformation is also demonstrated.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2008年第6期450-453,共4页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(50505031)
国家高技术研究发展计划(863)项目(2006AA04Z327)
新世纪优秀人才支持计划资助项目.
关键词
微机电系统
数字散斑相关技术
频闪成像
平面运动
micro-electro-mechanical system
digital speckle correlation method
stroboscopic imaging
in-plane motion
