摘要
研制了632.8 nm光波段X切Y传Ti扩散铌酸锂质子交换光波导偏振器。从理论上分析了钛(Ti)扩散及质子交换(PE)LiNbO3波导折射率改变机理,以及影响器件性能的各种因素。实验结果与理论计算符合良好,达到了集成光路中对器件的偏振要求,为其他类型偏振器的研制提供了理论依据。
Optical waveguide polarizer at 632.8 nm,in X-cut,Y-transmission,was fabricated using proton exchange conjunction with Ti diffusion in LiNbO3. The variation mechanism of refractive index was analyzed in Ti diffusion waveguides and proton exchange waveguides,and the various factors affecting the device performance were analyzed as well. The experiment results are in great agreement with theoretical calculation, which achieve the requirements of the integrated optical circuits, and provide theory basis for the research of other polarizers.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2007年第4期494-497,共4页
Semiconductor Optoelectronics
基金
部级科研项目(51487030105BQ0301)
关键词
Ti扩散
质子交换
消光比
插入损耗
Ti diffusion
proton exchange
extinction ratio
insertion loss
