摘要
对于X切H∶LiNbO3光波导,在532nm和1310nm波长下,用棱镜耦合器进行了工艺仿真研究.对于在150℃,180℃和200℃用苯甲酸质子交换的光波导,分别求得交换厚度与交换时间的关系曲线,在此基础上给出质子交换的扩散系数与交换温度的关系曲线.对于在180℃质子交换并在350℃退火的光波导,给出以交换时间(交换厚度)为参变量的表面折射率增量、有效厚度与退火时间的关系曲线.研究结果可供低损耗α相单模波导的设计和制备做参考.
Technical modeling of x-cut H ： LiNbO3 optical waveguides is researched by prism coupler at the wavelength of 532 nm and 1310 nm. For optical waveguides proton-exchanged in pure benzoic acid at 150℃, 180℃ and 200℃, relationships between exchanged thickness and exchanged time are given, respectively,and on this base, a relation curve of diffussion coefficient of proton-exchange to exchanged temperature is plotted. For the waveguides proton-exchanged at 180℃ and annealed at 350℃, the changes of surface refractive index increment and effective thichness with annealing time are obtained. The results can be used to design and fabricate the low loss a phase single mode waveguides.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2005年第7期996-1000,共5页
Acta Photonica Sinica
关键词
铌酸锂
光波导
质子交换
退火
LiNbO3
Optical waveguide
Proton-exchange
Annealing
