摘要
利用电子束热蒸发镀膜的方式,以高纯度的ZnO和TiO2颗粒为原料,以Si为基底在有氧的气氛中制备ZnO/TiO2复合薄膜。研究制备温度对ZnO/TiO2薄膜的结构以及发光性能的影响。通过拉曼(Raman)谱和X射线衍射(XRD)谱分析了ZnO/TiO2薄膜的结构,表明所制备的ZnO薄膜为非晶态。用光致发光(PL)谱表征了它的发光特性,数据表明在250℃时制备的非晶态ZnO薄膜在波长389 nm处具有极强的紫外光发射,在波长431 nm处发出很强的紫光,在波长519 nm处发出较强的黄绿光。
Using pure ZnO and TiO2 grains, ZnO/TiO2 thin films were fabricated on Si substrates by electron beam evaporation method in 02 environment. The structure and photoluminescence of ZnO/TiO2 thin films grown under different temperatures were investigated. The structural properties were investigated by X-ray diffraction and Raman spectra. The data indicate that the ZnO film deposited on TiO2buffer layer are amorphous. Their optical properties were investigated by photoluminescence spectra. The photoluminescence measurements show that the amorphous ZnO/TiO2thin film prepared at 250 C emits strong UV at 389 nm, strong violet light at 431 nm and strong green-yellow light at 519 nm.
出处
《应用光学》
CAS
CSCD
2007年第4期421-425,共5页
Journal of Applied Optics
