摘要
晶圆加工过程中使用的模块化组合设备具有可重构性,设备配置的复杂程度由晶圆加工工艺方案决定,针对这一特点,研究了晶圆加工系统的Petri网建模问题。对晶圆加工模块化组合设备的加工流程进行了分析,给出了描述晶圆加工过程的时间Petri网模型。为避免Petri网模型随着设备复杂程度的增加而迅速膨胀,通过对系统运行特点的分析,建立了着色时间Petri网模型,网中节点数为常数值,与设备的复杂程度无关。从满足晶圆加工时间约束的角度,给出了带有时序控制器的着色时间Petri网模型,该模型有助于研究复杂制造系统的动态行为和生产过程控制。
The complexity of a cluster tool configuration depends on wafer processing alternative. According to the characteristics, the modeling problem using Petri net for cluster tools in wafer fabrication was studied. The wafer fabrication process in duster tool was described firstly, and a timed Petri net was generated from this description. The performance of the modeled system was analysed, and a timed colored Petri net was proposed to prevent the number of nodes in the net from exploding with the complexity of cluster tool configurations. Finally,the colored timed Petri net model was modified with a scheduling controller to satisfy the time constraints in wafer fabrication. It will be helpful to study the dynamic behavior and production control for a complex manufacturing system.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2007年第11期1307-1311,共5页
China Mechanical Engineering
基金
国家自然科学基金资助项目(60574066)
