摘要
晶圆制造是半导体制造过程中的一个重要环节,晶圆制造单元的性能直接影响晶圆制造的成本。为了有效地分析晶圆制造单元的动态性能,分别对加工设备存在瓶颈和搬运机器人存在瓶颈的两种情况,进行了赋时Petri网建模研究,建立了晶圆制造单元的赋时Petri网模型。在此基础上,进行了稳态生产率分析,同时用实例验证了模型的有效性和实用性。
In semiconductor manufacturing,wafer fabrication is a key element,and its cost is affected by the performance of Wafer Fabrication Cluster Tool（WFCT） directly.In order to analyze dynamic performance of the WFCT effeetively,a WFCT modeling method of timed Petri nets is studied in two eases--machine bottleneck and single blade robotic transporter bottleneck,and timed Petri net models of the WFCT are buih.On the basis of mentioned above, steady-state throughputs of the WFCT are discussed.Finally the numerical examples are used to verify the validity and practicality of the models.
出处
《计算机工程与应用》
CSCD
北大核心
2006年第35期222-225,共4页
Computer Engineering and Applications
基金
国家自然科学基金资助项目(60574054)
新世纪优秀人才支持计划资助项目(2006)
上海市科委登山行动计划项目(06DZ11202)。
关键词
晶圆制造
赋时PETRI网
建模
性能分析
wafer fabrication
timed Petri nets
modeling
performance analysis
