摘要
模块化组合设备(cluster tool)是晶圆制造过程中的一种典型的集成化设备,设备配置的复杂程度由晶圆加工工艺方案决定。针对这一特点,研究了多组合设备(Multi-cluster tool)系统的Petri网建模问题。本文对晶圆加工多组合设备的加工流程进行了分析,提出了一种多组合设备系统的分解方法,并构建了多组合设备系统的着色时间Petri网模型。
The cluster tool is a typical integrated devices in wafer fabrication process,the complexity of a cluster tool configuration depends on wafer processing alternative.According to the characteristics,the modeling problem using Petri net for Multi-cluster tool is studied.？This paper analyzes the wafer fabrication process in multi-cluster tool,a decomposition method is utilized to reduce a multi-cluster tool problem to multiple sing-cluster tool problems,and the modeling of a multi-cluster tool is constructed with colored timed Petri net.
出处
《机电产品开发与创新》
2010年第6期85-87,共3页
Development & Innovation of Machinery & Electrical Products
