摘要
研制了一种基于单惯性质量块的一体化结构三维加速度传感器。依据传感器的工作原理,采用有限元工具对传感器静态和动态特性进行了分析,给出了弹性体的应变分布、固有频率及振型等,按各轴向灵敏度及其一致性和固有频率等目标对传感器结构尺寸进行了优化设计。有限元分析计算和实验结果表明,所研制的传感器在三个正交方向上都有较高的灵敏度,各加速度分量互干扰小。
This paper presented a novel three-axis accelerometer. It uses strain gauge as sensing element for the detection of acceleration. The sensor was designed from the results of finite element method （FEM） simulation. The static and dynamic characteristics of the sensor were analyzed. The calculations and experiments prove this sensor is of high sensitivity and small cross sensitivity in three axes.
出处
《中国测试技术》
CAS
2007年第3期133-135,共3页
CHINA MEASUREMENT & TESTING TECHNOLOGY
基金
安徽省教育厅自然科学基金项目(2002kj270)
关键词
多维加速度
传感器
有限元法
剪切应变
优化设计
Multidimensional acceleration
Sensor
Finite element method
Shear stress
Optimization design
