摘要
基于E型膜片设计了一种新型多维加速度传感器弹性体结构 ,并介绍了这种低成本传感器的工作原理。有限元仿真分析得到了弹性体结构的静态和动态特性 ,结果表明该结构对各轴向加速度都具有较高的灵敏度 。
Based on the E-type membrane, a new elastic body of multi-axis accelerometer is designed.The working principle of this low-cost accelerometer is introduced also. The finite element method (FEM) stimulation is utilized to obtain the static and dynamical characteristics of the elastic body. The results demonstrate that this structure has high sensitivities to accelerations in each axis and can eliminate cross-axis sensitivities.
出处
《传感技术学报》
CAS
CSCD
2003年第4期379-383,共5页
Chinese Journal of Sensors and Actuators
基金
国家 8 6 3计划项目 (2 0 0 1AA4 2 3180 )
