摘要
介绍了一种可用于振动测量的三维加速度计弹性体结构,其采用3个相互垂直的双平行应变梁组合的形式,每个平行梁敏感一个分量的加速度。经分析和试验结果表明:该加速度计具有灵敏度较高、交叉干扰小,完全满足预期设计要求。
A new elastomer of 3-D aecelerometer for vibration measurement is presented. Three vertical doubleparallel-girder beams are used, and component of acceleration is sensed by each parallel beam. Through analysis and experiment, results show that the accelerometer has characteristic of high sensitivity and lower cross interference ,and can meet the needs of expected design.
出处
《传感器与微系统》
CSCD
北大核心
2006年第2期61-63,共3页
Transducer and Microsystem Technologies
