摘要
研究了用直流气体放电活化反应蒸发沉积法技术制备的超微粒子复合薄膜的电学性质及气敏性质，并对其作用机理进行了分析解释．
The electrical properties and gas sensitive characteristics of SnO_2/ZnOultrafine particle thin film(UPF) for alcohol were investigated when the bilayer thinfilms were in the eharic field. The bilayer films were deposited by DC gasdischarge activating reactive evapotation technique. The work mechanism wasstudied and some explainations were proposed.
出处
《传感器技术》
CSCD
1997年第1期9-11,共3页
Journal of Transducer Technology
