摘要
采用直流气体放电活化反应蒸发法，沉积成ＳｎＯ＿２超微粒子薄膜（ＵＰＦ）。以不同能量的离子束轰击薄膜表面，用扫描电子显微镜、俄歇电子能谱仪等，分析了离子束作用对ＳｎＯ＿２ＵＰＦ表面形貌和化学组成的影响。同时研究了离子束作用前后，ＳｎＯ＿２ＵＰＦ对乙醇的气敏性质的变化。
SnO_2 ultrafine particle films were deposited by d.c. gas discharge activating reaction evaporation. The ion beams with various energy were used to bombard the SnO_2 UPF.Influence of ion beam bombardment on the SnO_2 UPF surface morphology and chemical composition was analysed by SEM and AES. The gas sensing properties of SnO_2 UPF to C_2H_5OH gas before and after being bombarded were also studied.
出处
《华东理工大学学报（自然科学版）》
CAS
CSCD
1994年第5期693-697,共5页
Journal of East China University of Science and Technology
关键词
离子束
氧化锡
超微粒子
薄膜
ion beam
tin oxide
morphology
sensitivity
ultrafine particle films
