摘要
用直流气体放电活化反应蒸发法制备了氧化锡超微粒子薄膜（Ⅰ），再用直流平面磁控溅射法掺杂Ｐｔ。Ｐｔ的掺入使Ⅰ的晶粒增多、电导下降，还使薄膜的气敏特性得到显著改善，讨论了Ｐｔ掺杂对薄膜灵敏度影响的机理。
The Tin oxide ultrafine particle films were deposited by D. C. gas dischargeactivating reactive evaporation. The deposited films were dopped with platinum by magnetronSputtering.The surface structure and composition of the prepared films have been inves-tigated by AES and XRD. The electrical pxoperties and the effect of Pt addition on gas-sensingcharacteristics as well as its mechanisms have also been investigated.
出处
《华东理工大学学报（自然科学版）》
CAS
CSCD
1994年第2期228-232,共5页
Journal of East China University of Science and Technology
基金
国家自然科学基金
关键词
氧化锡
超微粒子
薄膜
气敏特性
tin oxide:ultrafine particle:thin film:gassensing characteristics:surface
