摘要
采用化学镀的方法解决电真空器件封接中的石英玻璃表面金属化问题。利用金相显微分析、XRD、SEM和EDS等分析手段,系统研究了化学镀前处理工艺和镀液成分、pH值以及温度、施镀时间等工艺参数对镀速和镀层质量的影响规律。结果表明:较好的石英玻璃镀前处理工艺流程为:清洗→除油→粗化→热处理→敏化→活化→热处理。施镀工艺中,对化学镀镀速影响大小的顺序依次为:温度、镍磷比、柠檬酸钠浓度、pH值,且各因素对镀速影响规律不同。推荐较好的施镀工艺为:28g/L硫酸镍,26g/L次亚磷酸钠,30g/L柠檬酸钠,15g/L乙酸钠,0.001g/LPbCl2,温度为70℃,pH值为5.0。
In this paper, the problem oi quartz glass metallized was solved by electroless Ni-P alloy, The pretreatment processing and the influences of the preparation factors, such as temperature, x（Ni^2＋/H2PO2^-）, sodium citrate and pH on electroless deposition rate were systematically studied in this paper by metallograph, XRD, SEM, and EDS. The main results and conclusions were presented as follows. The order of the pretreatment processing was cleanout, degrease, coarsen, heat treatment, sensitize, activation and heat treatment. It was realized that the preparation rates of the Ni-P alloy plating was affected by this factors, the remarkable gra- dation was temperature〉X （Ni^2＋/H2 PO2^-）〉 sodium citrate〉 pH. The better electroless processing was proposed as follows： NiSO4 of 28g/L, NaH2PO2 of 26g/L, sodium citrate 30g/L, NaAc of 15g/L, PbCl2 of 0.001 g/L, temperature of 70℃, and pH of 5.0.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2007年第2期268-271,275,共5页
Journal of Functional Materials
基金
国家自然科学基金资助项目(10502025)
江苏省高校自然科学基金资助项目(05KJB1300421)
