摘要
介绍一种新型的温度传感器——镍膜热敏电阻。该传感器的优良特性已为人们所关注。本文着重探讨镍膜热敏电阻的制作工艺条件对其性能的影响。同时介绍了作者研制的镍膜热电阻的特性和主要技术指标。镍膜热敏电阻是一种很有开发前景的感温元件。
A new kind of temperature sensors with excellent performance is intro-duced with emphasis on the fabrication technology and the influence of the technologicalprocesses on the properties of the sensor.The characteristics and the principal technicalspecifications of the nickel film thermal resistor developed by the authors are presented.This kind of sensors is a highly promising one.
出处
《电子科技大学学报》
EI
CAS
CSCD
北大核心
1990年第5期513-518,共6页
Journal of University of Electronic Science and Technology of China
关键词
镍膜
热敏电阻
温度传感器
temperature sensor
nickel film thermal resistors
vacum deposition
temperature coefficient of resistance
heat-treatment
