摘要
介绍了非晶YBCO薄膜用作非制冷热释电红外探测器材料。它在室温下显示出强的热释电行为,并且容易在室温下采用射频磁控溅射法沉积,制备工艺与CMOS工艺相兼容,是一种很有潜力的热释电探测器材料。并介绍了非晶YBCO热释电薄膜的研究现状,阐述了该薄膜及其探测器的制备技术和研究动向。
Amorphous YBCO thin films are attractive as the temperature sensitive element for uncooled pyroelectric detectors. The thin films exhibit strong pyroelectric behavior at room temperature. It can be easily fabricated by rf magnetron sputtering at room temperature, so it is compatible with CMOS techniques. Amorphous YBCO thin films may be promising for application in pyroelectric infrared detector. The current study situation of amorphous YBCO thin films is introduced in the paper. It summarizes the preparation process and developing tendency of the thin films and the relevant detectors.
出处
《激光与红外》
CAS
CSCD
北大核心
2006年第10期957-959,共3页
Laser & Infrared
