摘要
基于音圈电动机直驱,提出一种采用新型弹性解耦机构的2自由度笛卡儿坐标高速高精度定位平台。该平台将电动机放置在基座上,使运动惯量大大减小,从而使实现定位平台的高速高精密运动成为可能。阐述了该定位平台的弹性解耦原理,采用有限元分析与机械系统动态仿真相结合的方法,对定位平台的高速动力学行为进行研究。通过机构的刚体和弹性动力学分析,基于定位平台的动态响应,对弹性解耦机构中的关键部件——弹簧,进行动态优化设计。详尽地探讨了铰链弹性对弹簧刚度和预载选配的影响,以及弹簧刚度和预载对定位平台运动的影响规律,并给出弹簧刚度和预载的匹配曲线,从而为该类制造装备的动力学设计和样机建造奠定了重要理论基础。精度试验表明,该高速精密定位平台的各项指标均达到了设计要求,证明了设计理论的正确性。
A high speed precision positioning x-y table with new elastic decoupling mechanism is developed based on the voice coil actuator direct driving. The motors are placed on the base, so that the small moving mass makes it possible that the positioning table moves at high speed and precision. The decoupling theory is expatiated. By use of the FEA and dynamic simulation method, the dynamic characteristics of the high speed table are studied. Based on the dynamic response of rigid and elastic body, the spring as the key component in the decoupling mechanism is investigated. The influence of the flexibility of hinge on the spring stiffness and preload is discussed in detail, and the influence of the spring stiffness and preload on the positioning table is also given. At last, the matching law of the spring stiffness and preload is presented. The achieved results would be helpful to the dynamic design of the kind of manufacturing equipment. All design parameters achieved and the design theory also prove its correctness in the precision experiment.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2006年第8期114-119,共6页
Journal of Mechanical Engineering
基金
国家863计划资助项目(2003AA404-04)
关键词
定位平台
动力学仿真和设计
弹性元件
弹簧
Positioning table Dynamic simulation and design Elastic components Spring
