摘要
研制了一套基于激光莫尔信号的超精密定位工作台,定位台以微型计算机为核心,采用激光莫尔传感器检测位置偏差,通过光、机、电的有机结合,可实现纳米级超精密自动定位。定位装置采用串联型粗、微双驱动的精密定位系统,粗动台由步进电动机通过精密丝杠机构直接驱动,可实现大行程微米级定位,微动台由压电陶瓷驱动器驱动,可实现纳米级定位。针对系统存在非线性、时变性,经典PID控制无法达到理想控制效果的缺陷,提出基于BP神经网络的精密定位智能控制,可有效改善定位系统的动、静态性能,提高重复精度。试验结果表明,精密定位台的工作行程可达50 mm,定位精度为±10 nm,定位时间小于30 s。
An ultra-precision positioning stage based on laser-Moiré signals is developed,which takes a microcomputer as its core,adopts a laser moiré sensor to detect the position deviation,and can realize automatic ultra-precision nanopositioning by organic combination of optical,mechanical and electronic technologies.The stepping-motor drives the macro-stage by precise lead screw drive set,which can realize large-stroke micron positioning.The PZT drives the micro-stage,which can realize nanopositioning.In view of the existing nonlinearity and time-variation of the system,and the difficulty in achieving ideal control effect by conventional PID controller,the intelligent control of precision positioning based on BP neural network is proposed,which can effectively improve the dynamic and static performance and the repeatability of the positioning system.The experimental results show that the working stroke of the precision positioning stage can reach 50 mm,the positioning accuracy is ±10 nm and the positioning time is less than 30 s.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2011年第9期187-192,共6页
Journal of Mechanical Engineering
基金
国家高技术研究发展计划(863计划,2005AA303610)
江苏省自然科学基金(BK2009406)资助项目
关键词
莫尔信号
纳米定位
神经网络
智能控制
Moiré signals Nanopositioning Neural networks Intelligent control
