摘要
本文对光刻胶熔融法制作微小透镜阵列的机理进行了进一步深入的理论和实验研究，特别是提出和研究了非球面表面的形成问题。对微小透镜，特别是非球面形成过程的参数控制，例如对光刻胶小圆柱的高度、熔融光刻胶和基片的接触角的控制进行了较详细的讨论。我们制出了具有较好性能的微小透镜列阵，并给出了测量结果以及实物和成象照片．最后，给出了一种建议采用的实时控制高质量微小透镜列阵形成的装置方案。
A further study on the fabrication of microlens array by melting photoresist is describcd.The formation of aspherical surface is considered.The parameters for controlling the process of lens producing,the height of original photoresist cylinders and the angle of contact between the melted photoresist and the substrate,are discussed in detail.The photoresist microlens arrays have been obtained,and some measurement results are shown in the paper. A method of controlling the formation of quality microlens array in real time is suggested.
出处
《光子学报》
EI
CAS
CSCD
1996年第10期909-913,共5页
Acta Photonica Sinica
