摘要
研究了制作折射型微透镜列阵的一种新方法光刻胶热熔成形法，获得了２０×２０的折射型微透镜列阵，单元微透镜相对口径为Ｆ／２，单元透镜直径为９０μｍ，中心间隔１００μｍ，透镜的波像差小于１．３波长。本文详细阐述了光刻热熔法的基本原理及微透镜设计方法，并讨论了工艺参数对微透镜列阵质量的影响。
A new method of fabricating refractive microlens by melting photoresist was presented in this paper. The microlens array composed of 20 × 20 F/2 microlens with 90 μm diameter on 100 μm centers have been obtained. The wave aberration of the microlens was estimated less than 1.3 wavelength. The principle of the method and the design model of refractive microlens are described. The effects of fabrication parameters on the quality of the microlens are discussed.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1996年第9期1326-1331,共6页
Acta Optica Sinica
基金
国家自然科学基金
关键词
微透镜列阵
微光学
光刻胶
光学元件
microlens arrays, microoptics, measurement, photoresist.
