摘要
介绍了基于点衍射干涉仪的环形子孔径拼接检测非球面的理论和方法,分析了其基本原理,相对传统非球面检测方法,这种方法可以有效避免高精度补偿器件的使用,它通过不同曲率半径的球面波前来匹配被测非球面的不同同心环带区域,然后通过拼接算法重构整个非球面表面。在对一非球面的仿真测试中,测量的PV值为λ/131,RMS值为λ/830(工作波长为632.8nm),试验表明:该算法是切实可行的,具有较高的精度。
An annular subaperture sewing method based on point diffraction interferometer was introduced to test aspheric surfaces, and the basic principles was analyzed. It could solve the problem of using high precision auxiliary element relatively traditional aspheric surface testing methods. This method changed the distance between the measured aspherical surface and the reference spheric wavefront to match the annular subaperture, then sewed all subaperture data together with the algorithm described in this article to get the whole phase information of the surface. In the computer simulation experiment, an aspheric element was measured, the PV and the RMS value of the full aperture surface error is λ/131 and λ/830 （operation wavelength is 632. 8nm）. The results showed that the method is feasible and accurate.
出处
《光学仪器》
2009年第3期61-65,共5页
Optical Instruments
关键词
非球面
环形子孔径
光学检测
拼接
点衍射干涉仪
aspheric surface
annular subaperture
optical measurement
stitching
point diffraction interferometer
