摘要
详细介绍了Tl+-Na+离子交换制备玻璃波导1×4功分器的工艺制作过程。首先采用BPM软件设计波导光路图,设计并制作出具有10μm和20μm两种线宽的1×4模板,加工出3．5 cm×1．5 cm×0．5 cm基底玻璃板。然后按照工艺在玻璃面上镀上1μm厚度的钛膜。依照母板模型对基底玻璃板进行光刻,得到理想对称S形状的钛膜窗口。在480℃交换温度下,把基底玻璃板放在Tl2SO4,ZnSO4的混合熔液中经过10 h的交换。一块低损耗S型多模光波导功分器形成。接着经过研磨、抛光等工艺制作出体积小、操作方便、性能稳定、光损伤小和与光纤匹配的光功分器样品。
Abstract： The processes of design and fabrication of 1×4 optical splitter in a buried Tl^＋-Na^＋ ion - exchanged glass wavegnide were introduced in details. Firstly, the windows widths of 1×4 light path were 10μm and 20μm by BPM software, respectively. And a glass substrate（3.5 cm × 1.5 cm ×0.5cm） was fabricated in the laboratory. Secondly the glass substrate was well polished and carefully cleaned. Onto it a thin 1μm titanium layer was evaporated in high vacuum chamber. Then the S shape open window was etched by a standard photolithographic process. Thirdly, the thermal diffusion process was performed in the thallium sulphate molten bath（Tl2SO4） at a temperature 480℃. After 10 hours, a low -loss multi - mode optical wavegnide was produced. Lastly, after well polished and carefully buffed, a stable and low loss glass wavegnide splitter was accomplished.
出处
《西南科技大学学报》
CAS
2006年第1期80-82,共3页
Journal of Southwest University of Science and Technology
关键词
光波导
功分器
离子交换
玻璃
optical waveguide
optical splitter
ion - exchange
glass
