摘要
本文研究了合成参数对形成 Si_3N_4超细粉化学成分、比表面积、粒径尺寸分布、形貌及结构等方面的影响规律。得出了制备粒径小于50nm,Si_3N_4含量大于96wt-%的最佳合成参数范围。
Influence of Laser synthesis process parameters on Si_3N_4 chemical composition,shape,sizeand its distribution,BET as well as crystalline structure were studied systematically.A range of optimumsynthesis process parameters were obtained for making the powder of<50nm dia and Si_3N_4≥96wt-%.
基金
国家自然科学基金 85029
关键词
激光气相法
SI3N4
细粉
合成
粉体
laser synthesis powder
ultrafine Si_3N_4
process parameters
powder characteristics.
