摘要
本文叙述了用CW-CO_2激光作热源,驱动硅烷和氨反应,制备Si_3N_4超细粉。讨论了制备超细粉所用的实验装置和工艺条件。
Si_3N_4 superfine powders were prepared by CW-CO_2 laser heating gas-phase reactants of SiH_4 and NH_3.In this paper,the processing conditions and experimental instrument for making the Si_3N_4 powders are discussed.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1990年第3期245-250,共6页
Journal of Inorganic Materials
