摘要
对一种新型位置传感器-PSD的结构、特性、检测电路和应用系统的设计进行了较为详细地介绍,这种传感器与CCD点阵式位置传感器相比,具有响应时间快、外围电路简单、分辨率高、以及不受入射光束和焦点偏离的影响等特点.
PSDs(position sensitive detectors)is a new type of position sensor, based on lat-eral photo effect of PN conjunction in Pin photodiode,which is characterized by high rcaponsespeed, high resolution,simple periphiey circuits and independent of light-spot focus,comparedwith imaging CCD array.The structure,characteristics measurement circuits and system designof this sensor are introduced.
关键词
位置传感器
模拟归一化
数字归一化
position sensors,analogue normalidzation processing, digital normalization.