摘要
本文在衍射理论基础上，深入分析了菲涅耳型衍射光学元件的特性，针对连续及二元浮雕结构，建立了位相深度因子（M），波长匹配系数（α）与衍射效率的关系式，对影响衍射效率的因素进行了讨论．研究了设计与工艺的匹配问题，建立了数值孔径，最小特征尺寸与衍射效率的关系，为不同波段衍射光学元件的应用，及设计和评价衍射光学元件提供了有效的理论方法．本文最后举例分析了用于白光波前传感器中的小数值孔径微透镜列阵的性能，并对衍射效率及传递函数两个综合指标进行了测量．
Based on diffractive theory,the properties of Fresnel diffractive optical element withcontinuous profile and binary profile have been analyzed－ A relationship between phase depth factor(M),wavelength match factor (a) and diffractive efficiency (DE ), as well as a relationshipbetween numerical aperture,minimum feature and DE are established, and some effects whichmake DE degraded have been also discussed in the paper. As an example, the DE and MTFof microlens arrays which were used in Shack－Hartmann sensor have been analyzed and measured.
出处
《光子学报》
EI
CAS
CSCD
1997年第9期824-831,共8页
Acta Photonica Sinica
关键词
菲涅耳型
衍射光学元件
衍射效率
Fresnel diffractive optical element
Diffractive efficiency
