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MSOS电容器的研制及其C-V特性分析

Preparation and Search of MSOS Capacitor and Its Analyses of C-V Characteristic
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摘要 在MOS电容器的基础上提出了一种新型的电容器,它是由金属-非晶态半导体-氧化物-半导体4层结构组成的电容器,简称为MSOS电容器,用C-V仪画出了它的C-V特性曲线;并用能带模型对此特性进行了分析,该电容器的特性是通过控制外加电压V,可以改变其电容量C,且在V=0值附近出现峰值Cmax. On the bases of MOS capacitor this paper has presented a kind of new capacitor with four layer structures which consists of Metal-Semiconductor-Oxide-Semiconductor, for short as MSOS capacitor; and we have drawn its C-V characteristic curve by C-V plotter;and we have analysed its C-V characteristic by energy band model. The capacitor has some characteristic that can change its capacitance C by control to applied voltage V, and the capacitance C has a peak Cmax near by V=0. The capacitor with this a characeristic was not found in literature.
作者 龚道本
出处 《中南民族学院学报(自然科学版)》 1996年第1期7-11,共5页 Journal of South-Central University for Nationalities(Natural Sciences)
关键词 MSOS电容器 耗尽层电容C C-V特性 压控电容器 MSOS capacitor depletion layer capacitance Cs oxide layer capcacitance C, C- V characteristic
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