摘要
采用微波等离子体化学汽相淀积法，以Ｃ６０膜为过渡层，在光滑的单晶Ｓｉ衬底（１００）表面和研磨的石英衬底表面等光学衬底上，首次在无衬底负偏压条件下生长出多晶金刚石薄膜，通过扫描电镜观察到生长膜晶粒呈莱花状，生长表面为金刚石（１００）晶面。
A new method for diamond nucleation on the mirror surface of nondiamond substrates using C 60 films as the intermediate layers is presented. The polycrystalline diamond films have been deposited on Si(100) mirror surface and on SiO 2 scratching surface without higher substrate negative bias pretreatment prior to diamond growth by microwave plasma chemical vapor deposition. The diamond grains of resulted films show cauliflower like small crystalline aggregates, and the morphologies of the grains show (100) faces in SEM images.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1996年第5期675-678,共4页
Acta Optica Sinica
基金
国家教委年轻教师基金
湖南省自然科学基金
关键词
富勒烯
过渡层
金刚石
薄膜
Fullerene, intermediate layer, diamond film.
