摘要
通过对硅电光调制器研究结果的分析，提出厂低功耗高速调制的新技术。即采用不均匀掺杂人为引进漂移场和限制注入载流子运动范围以提高其浓度等方法，达到高速低功耗调制的目的。
Based on analyzing the research results of St electro-optical modulator, a new technology of low power dissipation and high speed modulation is presented in this paper. In order to achieve high speed and low power dissipation modulation,non-uniform doping should be adopted to introduce a drift field,and moving range of the injected carriers should be confined to increase its concentration.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1995年第4期377-380,共4页
Research & Progress of SSE
基金
国家八六三项目
关键词
硅
集成光学
调制技术
Si Integrated Optics Modulation Technology
