摘要
在分析莫尔偏折术测量误差的基础上探讨了一种反射准直式莫尔偏折法，并阐述了其几种应用。该法简单方便，相对定位精度可达０．１％左右。
The influence of beam-divergence on the measuring error in Moire deflectometry is ana-lyzed.The direction modulation of the moire fringe due to the mirror defocusing is studied. Based on the feature that the beam will be collimated with high accuracy when using the moire deflectornetry,moire deflectometry with reflective collimation is proposed.It is used in the precision positioning and the acquisition of the dynamic focusing servo signal in the op-tical Fourier transform system. It is simple and convenient and a relative positioning accura-cy of 0.1%can be achieved.
出处
《华中理工大学学报》
CSCD
北大核心
1995年第A01期19-22,共4页
Journal of Huazhong University of Science and Technology
关键词
莫尔偏折术
准直
反射
定位
几何光学
Moire deflectometry
collimation
reflection
positioning
