摘要
介绍了纳米电子器件与纳米电子技术的概念以及纳米电子器件的分类;综述了现有的光刻、外延、SPM、特种精细加工等相关的纳米电子器件制备与加工技术;阐述了纳米电子技术中急需解决的若干关键问题。
The concept and classification of nano-electronic component and nano-electronic technology are introduced,and the fabrication technologies of nano-electronic components,such as lithography,epitaxial growth and SPM,are reported. At last some impending problems on nano-electronic technology are listed as well. It should be beneficial for readers to comprehend nano-electronic components and nano-electronic technology.
出处
《微纳电子技术》
CAS
2004年第6期14-19,共6页
Micronanoelectronic Technology
关键词
纳米电子器件
纳米电子技术
光刻
外延
SPM
nano-electronic components
nano-electronic technology
fabrication of nano-electronic components
