摘要
本文简单介绍了类金刚石膜的制备方法、并讨论了膜成分、结构、电阻率、硬度、内应力和附着力等性能，总结了类金刚石膜在机械、电子、声学、电子计算机、光学和医学等领域的应用状况以及将来的发展趋势。
The deposition methods of Diamond-Like Carbon films are briefly introduced in this paper.The properties of the films such as chemical composition,structure, specific resistance, hardness, internal stress and adhesion, are also discussed here. Finally, the applications of the films in the fields of machinery,electronics, acoustics, computer, optics and medicine, etc., are summarized.
出处
《材料科学与工程》
CSCD
1994年第4期32-38,共7页
Materials Science and Engineering
关键词
类金刚石膜
性能
应用
Diamond-Like Carbon films, properties, applications
