摘要
介绍了应用激光光热偏转成象法无损检测光学薄膜激光损伤的基本原理 ,由此建立了实验检测装置 ,对光学薄膜表面的激光损伤进行了扫描检测 ,并以直观的灰度象显示 实验结果证明了激光光热偏转成象法检测光学薄膜激光损伤具有直观、有效。
The principle testing laser induced damage of optical thin films by laser photothermal deflection method (PTDM) and corresponding experimental testing set up are described. The laser induced damage on surface of optical thin films is tested by scanning surface using the set up. Grey image coded by tested two dimensional photothermal deflection signals is directly displayed and shown that the testing laser induced damage of optical thin films by PTDM possesses many advantages such as direct display of damage and determination of damage threshold. And the method is available.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2005年第1期158-160,共3页
Acta Photonica Sinica
基金
国家自然科学基金 (批准号 10 174 0 6 7)资助项目
关键词
光学薄膜
激光损伤
光热偏转法
Optical thin film
Laser induced damage
Photothermal deflection method
