摘要
用（Ｔａ２Ｏ５＋ＺｒＯ２）和ＳｉＯ２成功地镀制出两个波段（６３２．８ｎｍ，１．０６μｍ）的激光反射镜，使激光破坏阈值提高５％～１５％（对１．０６μｍ波段），膜层吸收小、机械强度增加。理论计算和测量混合膜成分含量表明，膜成分与配比成分存在６％～１３％的偏差。
A laser reflection mirror(632.8nm,1.06μm) has been successfully coated with(Ta2O5+ZrO2) and SiO2.As a result the threshold of laser damage has been increased by a factor of about 5 %～15%,with low film layer absorption and high mechanical strength.It is shown by comparison of component content of the film between theoretical calculation and measured value that compenent error is about 6%～13% between the theory and measurement.
出处
《半导体光电》
CAS
CSCD
北大核心
1994年第1期81-84,共4页
Semiconductor Optoelectronics
关键词
激光反射镜
薄膜材料
镀膜
Laser Reflection Mirror
Material of Thin Film
